年度 2015
論文名稱 J. C. Chiou, L. J. Shieh, Y. J. Lin, C. C. Hung, S. W. Tsai and C. Y. Lin, “CMOS-MEMS electrostatic cantilever resonator with low driving voltage,” Proceedings of the 13th Nano and Microsystem Technology Conference, Hsinchu, Taiwan, July 9-10, 2009.
發表日期 2015-06-12