年度 0000
论文名称 Shao-Ming Yu and Yiming Li, "A Computational Intelligent Optical Proximity Correction for Process Distortion Compensation of Layout Mask in Subwavelength Era", Abstract of IEEE the 2004 International Workshop on Computational Electronics (IEEE IWCE-10), Purdue University, West Lafayette, Indiana, USA, October 24-27, 2004, pp. 179-180. , 2004年10月
发表日期 1970-01-01