年度 2011
論文名稱 Y. L. Lai, Y. Z. Juang, S. C. Huang, S. H. Tseng, H. H. Tsai,“Effective Mechanical Properties Measurements in Standard CMOS Process,”Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010) Perth, WA, June 2010, pp. 126.
發表日期 2011-08-03