年度 2011
論文名稱 Yao-Jen Lee, Yu-Lun Lu, Fu-Kuo Hsueh, Kuo-Chin Huang, Chia-Chen Wan, Tz-Yen Cheng, Ming-Hung Han, Jeff M. Kowalski, Jeff E. Kowalski, Dawei Heh,Hsi-Ta Chuang, Yiming Li, Tien-Sheng Chao, Ching-Yi Wu, and Fu-Liang Yang, “3D 65nm CMOS with 320°C Microwave Dopant Activation,” Technical Digest of IEEE International Electron Devices Meeting (IEEE IEDM 2009), Baltimore, MD, USA, Dec. 7-9, 2009, pp. 31-34.
發表日期 2011-08-01