年度 2009
論文名稱 Kai-Tai Song and J.Y. Leu, “On-line Emissivity Compensation for Temperature Measurement of Semiconductor Wafers,” in Proc. of 1998 ROC Automatic Control Conference , Yunlin , Taiwan , pp. 9-10, 1998, pp. 529-534.
發表日期 2009-02-02